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KMID : 1137820090300060453
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의공학회지
2009 Volume.30 No. 6 p.453 ~ p.460
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Dynamic Flow Lithography Technologies
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Chung Su-Eun
Park Wook
Kwon Sung-Hoon
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Abstract
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In this review paper, concepts in optofluidics are applied to an advanced manufacturing technology based on self-assembled microparts. The "optical" aspect of optofluidics will be described in the context of photolithography, and the "fluidic" aspect will be discussed in the context of self-assembly. First, optofluidic maskless lithography will be introduced as a dynamic fabrication method to generate microparticles in microfluidic channels. Next, the history and application of optofluidic lithography will be presented.
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KEYWORD
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Photolithography, Microfluidics, Microparticle, Maskless lithography, Flow-lithography, Optofluidic maskless lithography
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